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Molecular dynamics simulations of the sputtering of SiC and Si3N4PRSKALO, A.-P; SCHMAUDER, S; ZIEBERT, C et al.Surface & coatings technology. 2010, Vol 204, Num 12-13, pp 2081-2084, issn 0257-8972, 4 p.Conference Paper

Molecular dynamics simulations of the sputtering process of silicon and the homoepitaxial growth of a Si coating on siliconPRSKALO, A.-P; SCHMAUDER, S; ZIEBERT, C et al.Computational materials science. 2011, Vol 50, Num 4, pp 1320-1325, issn 0927-0256, 6 p.Conference Paper

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